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SiliconOxide AdhesionForce self_healing SThM Vac NiFe Jason Workfunction STO Step AIN CuSubstrate Sio2 BTO Inorganic CuParticle Stiffness hetero_structure HighAcpectRatio piezoelectric force microscopy HanyangUniv dielectric_trench TiO2 MLCC Solar Hexacontane Microchannel ThinFilm Hole Pinpoint PFM UnivOfMaryland PetruPoni Electrode Phase Fe_film
