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TungstenThinFilmDeposition Ananth HighResolution Polydimethylsiloxane Piranha oxide_layer PolymerPatterns PS_PVAC Ceramics fluoroalkane SmalScan MechanicalProperty LiftHeight Thermoplastic_polyurethane Neodymium lift_mode HighAspect Vanadate Magnets China Temperature Polypropylene ItoGlass CalciumHydroxide chemical_compound PVAC aluminum_nitride doped kelvin probe force microscopy TemperatureControllerStage Scanning_Thermal_Microscopy ThermalDetectors Gong IcelandSpar Force-distance