InLiquid SurfaceOxidation aluminum_nitride BiasMode PvdfFilm NCM CuFoil UnivOfMaryland Heating TiO2 Etch Semiconductor Sio2 AIN Sapphire PyroelectricDetector Treatment IMT_Bucharest thermal_conductivity SFAs atomic_layer polymeric_arrays Bio Temasek_Lab PUR BoronNitride molecular_beam Nickel Oxide HDD Spincast fluoroaalkane Switching MBE hetero_structure