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ScanningSpreadingResistanceMicroscopy Workfunction Pipette frequency_modulation HACrystal Al2O3 Cancer PvdfFilm PpLdpe Pinpoint Blend Gong BlockCopolymer Current INSPParis ForceVolumeImage OxideLayer SiWafer PinpointNanomechanicalMode UnivOfMaryland self-assembled_monolayer BFO Lift Pattern Tape Moire Transparent Sphere Hydroxyapatite Bacteria Composition DLaTGS nanobar AmplitudeModulation ThermalProperties
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CMP test key
Scanning Conditions
- System : NX-Wafer
- Scan Mode: Non-contact
- Scan Rate : 1Hz for 100μm2 / 1.5Hz for 30μm2
- Scan Size : 100μm2, 30μm2
- Pixel Size : All 1024×512
- Cantilever : CMCL-AC240TS (k=2N/m, f=70kHz)