Scratch Silicon HexagonalBoronNitride DiffractiveOpticalElements Chemical Vapor Deposition Oxidation PatternedSapphireSubstrat Celebration optoelectronics FrequencyModulation layers Molybdenum PVAP3HT MBE semifluorinated_alkanes Scanning_Thermal_Microscopy Blood Semiconductor SiWafer Piezoresponse BlockCopolymer NCM\ Fendb GalliumPhosphide thermal_conductivity Copper Deposition LogAmplifier GaN CrossSection AdhesionForce hetero_structure Croatia Current HBN