Electical&Electronics self-assembled_monolayer LeakageCurrent LiIonBattery Co/Cr/Pt TungstenThinFilmDeposition AAO Copolymer light_emitting Ceramic AtomicSteps FastScan Mechinical ConductingPolymer non_contact Mobile dielectric trench Tapping EvatecAG INSP Copper Bmp phase_change Electrical&Electronics MfmPhase high_resolution PFM InorganicCompound PMNPT Semiconductor OrganicCompound LiquidCell GaN atomic_layer LowDensityPolyethylene